Chapter5 1 5. Synthesis of Conductive Sol-Gel ZnO Films and Development of ZnO Printed Electronics

Abstract ZnO thin films are synthesized and studied to understand the functionality of solution-processed semiconductor devices. A simple sol-gel technique is used to fabricate transparent conductive oxides (TCOs) and ultraviolet (UV) photodetectors from ZnO precursors via spin coating, inkjet printing (IJP), and aerosol jet printing (AJP). A variety of flexible and transparent substrates was selected based on the deposition and sintering conditions and the device application. Doping of ZnO films with Al3+, In3+, and Ga3+ was introduced in precursor solutions before deposition processes. Post-deposition processing was carried out in air, H2, and Zn environments to optimize thin film properties. Optical, structural, and electronic data analyses reveal the significant effects that deposition method, substrates, dopants, and processing conditions have on the optical transmission, crystallinity, grain size, and electrical conductivity.