Chapter1 3 1. Thin Film Deposition Technologies and Application in Photovoltaics

Abstract Renewable energy will play a critical role in reducing emissions to mitigate climate change. Photovoltaic (PV) is one of the most promising and prominent techniques for electricity generation based on renewable solar energy. Thin films play a critical role in PV in Si and thin film solar cells and solar modules. They can be used as an absorber layer, buffer layer, hole/electron transportation layer, passivation layer, transparent conductive oxide and antireflection coating on solar cells or solar modules. This chapter provides an overview of thin film deposition techniques and applications in photovoltaics and highlights techniques that are currently in use or are promising for mass production.